Quartz Megasonic Cleaning Tank
PVDF Megasonic Cleaning Tank
PVDF Megasonic Tank with Quick Dump Rinse
Features
- Reliable components, extensive 36 month warranty
- Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
- Field replaceable transducer arrays
- High watt density
- Operates at 70°C
Megasonic Equipment Specifications
Megasonic Tank & Transducer Specifications
Model specific information is supplied with each system.
- Megasonic Frequencies:975 & 730 kHz (+/-25 kHz) model dependent
- Tank Materials:Quartz, PVDF, or PFA
- Megasonic Transducer Plate:316L Electropolished or PFA PTFE coated Stainless
- Megasonic Transducer Cables:25 ohm PTFE jacketed, 5 meter length
- Maximum operating temperature for Boundary layer system:130°C*
- Maximum operating temperature for direct systems:70°C
- Operating Voltage:208-230 VAC +/- 10% single phase
- Limited Warranty:36 months
- Applicable Standards:Meets all applicable CE directives, 3rd party certified