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M Tek/Semitool Spin Rinser Dryer (SRD)

  • Cleaning, rinsing and drying of semiconductor wafers or photomasks after wet process or for effective chemical residue removal
  • Capable of process up to 8″ High Profile or 12″ Low Profile wafer/cassette
  • Available in Benchtop, Single Stack and Double Stack models:
    • S Model SRD: 8300S/880S/870S/470S/280S/270S
    • ST Mode SRD: ST-4300S/ST-2300/ST-470
    • F Model:  2300-F/870-F/470-F/270-F
  • Features: Brushes Motor, Non-Contact Labyrinth, Seal, Quick Disconnect Rotor, Electro polished Bowl Finish, High Uniform Spray Nozzle, and Ultra-pure teflon valve for optimum particle performance

Verteq Spin Rinser Dryer (SRD)

  • Cleaning, rinsing and drying of semiconductor wafers or photomask after wet process for effective chemical residue removal
  • Capable of process up to 8” wafer/cassette
  • Available in Single Stack and Double Stack models:
    • Model 1800-6 8″ SRD
    • Model 1600-34/44, 1600-55 6″ SRD
  • Features: Brushless Motor, Non-Contact Labyrinth Seal, RA-10 Finish Bowl Finish, High Uniform Spray Nozzle, Resistivity Monitor, and Ultra-pure teflon valve for optimum particle performance

SEMITOOL & VERTEQ SRD Spares

  • Standard and custom 1 to 12” Rotors
  • PSC-101 & PSC-102 SRD Controllers
  • LC4+, LC5+ Motor Controllers
  • Door Seals
  • DIW Valves, Statics Eliminator, etc
  • Customized 300mm Wafer Carrier
  • Customized Cassettes & Inserts for wafers, discs and square substrates
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