Features & Benefits

• Ultrapure PVDF/PFA wetted surfaces
• High-resolution touch-screen
• User-friendly graphical user interface (GUI)
• Plug-and-play system with complete integration of controls
• No N2purge required

Temperature Controls

• Excellent temperature stability
• Fast response to temperature and flow variations
• Eliminates excessive overshoots and drops in temperature
• Programmable logic controller (PLC) with Power-to-Flow™ control delivers constant, stable, and accurate temperature output
• Ethernet read/write connection enables rapid transfer of heater data to fab SECS/GEM systems (other communications available)

Safety Features

• Meets or exceeds stringent requirements for UL-499, SEMI S2, SEMI S3, and CE
• Short Circuit Current Rating (SCCR) at 100 kA
• Ground fault circuit interrupter (GFCI) system with a sub-30 mA rating
• Redundant safety PLC monitoring for GFCI, thermal cut-off sensor, and hi-limit thermocouples
• Redundant safety monitoring relay for door interlock switch and EMO
• NIST-certified thermocouples
• Dual-pressure relief valves for both input and output flows ensure rapid pressure dissipation
• Ground options for electrical safety and DIW compatibility